When it comes to the problems of deep-submicron modeling,the interconnectand its effect on cell and chip timing have taken on paramount importance.There have also been changes in design style and ...
This is a preview. Log in through your library . Journal Information This journal, begun in 1943 as Mathematical Tables and Other Aids to Computation, publishes original articles on all aspects of ...
Shrinking technology nodes and smaller process margins require improved photolithography overlay control. Generally, overlay measurement results are modeled with Cartesian polynomial functions for ...
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